- Aspheric Lens for
Camera - Lens for DVD,BD
- Free form mirror
- Micro trench hall
- MEMS
- Precision gear
Outline
It is impossible to manufacture parts without making measurements - the UA3P series supports nanometer-accuracy manufacturing by making precise measurements of fine shapes.
The UA3P series can measure aspherical lenses and free-form mirrors and their molds, which are essential for digital consumer electronics such as mobile phones, DSCs, DVDs, and Blu-ray recorders, as well as in home security, optical communications, and vehicle HUDs, to an accuracy of up to 0.01 µm.
Easy operation supports rapid feedback to machining.
Measurement accuracy and applicable field of each profilometer
Full lineup from ultrahigh accuracy measurement of ±0.10 µm at an inclination angle of 70° to measurement of large components of 
500 mm
Measurement area/accuracy by model
Measured object
 Mobile lens |
 Lens barrel |
 DSLR lens |
 fθ lens |
 X-ray telescopic mirror |
 Lens mold |
 Camera lens |
 Toric lens mold |
 Stepper lens |
Feature
Technology for realizing ultrahigh accurate measurement
Coordinate measurement technology
The profilometer’s coordinate system is configured with three reference flat surfaces (mirrors) independent of the stages. The length of each X, Y, and Z axis is measured to a resolving power of 0.3 nm with the laser interference method using a He-Ne frequency-stabilized laser as a light source. This suppresses the influence of squareness and straightness of the stages to achieve high-precision measurement
Measurement error due to coordinate axis :
0.05 µm max. (up to 100 mm)
0.3 µm max. (up to 500 mm)
Top-surface measuring probe/AFP (atomic force probe)
AF Probe
High-precision scanning and measurement of a measured object is feasible due to the use of ultra-low measuring forces.
The stylus is held by the micro-air slider, and the focus laser detects the movement of the stylus. The position of the AFP is tracked in line with the shape of the measured object to keep the measuring force constant.
Measuring force:0.15-0.30 mN (15-30 mgf)
* US3P-3000 requires 0.10-0.20 mN.
Stylus:
A diamond stylus with a tip angle of 30º and a radius of 2 µm can be used.
Side-surface measuring probe/S-AFP
Side-AF Probe
The inclination of a probe mirror detected at high precision is fed back to the XY stages to enable scanning measurement with low-contact force (0.3 mN).
This enables measurement without deforming resin products, such as a lens barrel.
Measuring force: 0.3 mN (30 mgf)
Measurement accuracy:
±0.15 µm (when measuring 90º inclination)
Maximum measuring angle:
Horizontal measurement: 45º - 90º
(angle relative to horizontal surface)
Vertical measurement: 80º - 90º
(angle relative to horizontal surface)
Software
Achieving high-speed and high-precision measurement with easy operation
Supporting any design information. An installation error in the measured object is three-dimensionally corrected to enable accurate profile measurement.
Top side surface evaluation technology
By synthesizing the top-surface data and side-surface data of a measured object, decentering and inclination of the optical axis of a lens or a mold can be evaluated with reference to the side surface.
