| Standard equipment | ||||
| Model name | UA3P-300 | UA3P-4 | UA3P-5 | |
| Appearance |  |
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| Outer dimensions (W x D x H) mm |
700 x 780 x 1500 | 1000 x 1100 x 1400 | 1200 x 1350 x 1550 | |
| Mass of main body | 700 kg (Others: 150 kg) | 1200 kg (Others: 150 kg) | 1500 kg (Others: 150 kg) | |
| Measuring range (X, Y, Z axes) mm |
30x30x20 | 100 x 100 x 35 | 200 x 200 x 45 | |
| Measured object placement area (X, Y, Z axes) mm |
100x100x100 | 220 x 220 x 115 | 330 x 330 x 230 | |
| Measuring probe | AFP | AFP | AFP | |
| Resolution | 0.3nm | |||
| Maximum inclination angle for top-surface measurement | 75º | 60º | 60º | |
| Angle for side-surface measurement | - | - | - | |
| Measurement accuracy with top-surface probe * When using the standard ruby stylus or ceramic stylus |
30° max.: ±0.05 µm (round trip) 45° max.: ±0.08 µm (round trip) 60° max.: ±0.15 µm (round trip) 70° max.: ±0.15 µm (back) |
30° max.: ±0.05 μm (round trip) 45° max.: ±0.10 µm (round trip) 60° max.: ±0.30 µm (round trip) |
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| Measurement accuracy by coordinate axis (XY axis measurement accuracy) |
100 mm max.: 0.05 µm (Repeatability 0.05 µm max. ) 200 mm max.: 0.1 µm (Repeatability 0.05 µm max.) |
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| Measurement speed | 0.005-5 mm/sec | 0.01-10 mm/sec | ||
| Operating environment | Temperature | 20-23°C (Variation ±1°C max.) | ||
| Humidity | 20-60% (Wind from air conditioners should not directly blow onto the equipment) | |||
| Vibration | Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2 | |||
| Required power source Power supply unit |
AC100V ±5%/15A | |||
| Air pressure source | 0.5 MPa - 1.0 MPa Flow rate 150 NL/min | |||
| Standard accessories | Standard ruby stylus, standard diamond stylus, AFP (Model 300: 1 pc., Models 4 and 5: 2 pcs. each), standard ball for calibration, printer | |||
| Large-scale equipment | ||||
| Model name | UA3P-500H / 550H | UA3P-650H | UA3P-700H | |
| Appearance |  |
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| Outer dimensions (W x D x H) mm |
1200 x 1350 x 1550 | 2100 x 1820 x 2110 | 2100 x 1820 x 2110 | |
| Mass of main body | 2300 kg (Others: 300 kg) | 8500 kg (Others: 300 kg) | 9000 kg (Others: 300 kg) | |
| Measuring range (X, Y, Z axes) mm |
200 x 200 x 45(500H) / 200 x 200 x 45, 260 x 90 x 45(550H) |
ø500 x 120 / 400 x 400 x 120 | 500 x 500 x 120 | |
| Measured object placement area (X, Y, Z axes) mm |
330 x 330 x 230 | 600 x 600 x 330 | ||
| Measuring probe | AFP*2 | AFP*2 | AFP*2 | |
| Resolution | 0.3nm | |||
| Maximum inclination angle for top-surface measurement | 75° | 75° | 75° | |
| Angle for side-surface measurement | - | - | - | |
| Measurement accuracy with top-surface probe * When using the standard ruby stylus or ceramic stylus |
30° max.: ±0.05 μm (round trip) 45° max.: ±0.08 μm (round trip) 60° max.: ±0.1 µm (round trip) 70° max.: ±0.15 μm (back) |
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| Measurement accuracy by coordinate axis (XY axis measurement accuracy) |
100 mm max.: 0.05 µm (Repeatability 0.05 µm max.) /200 mm max.: 0.1 µm (Repeatability 0.05 µm max. ) 400 mm max.: 0.2 µm (Repeatability 0.05 µm max.) /500 mm max.: 0.3 µm (Repeatability 0.05 µm max.) |
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| Measurement speed | 0.01-20 mm/sec | 0.01-30 mm/sec | ||
| Operating environment | Temperature | 20-23°C (Variation ±1°C max.) | ||
| Humidity | 20-60% (Wind from air conditioners should not directly blow onto the equipment) | |||
| Vibration | Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2 | |||
| Required power source Power supply unit |
AC100V ±5%/15A | |||
| Air pressure source | 0.5 MPa - 1.0 MPa Flow rate 250 NL/min | 0.5 MPa - 1.0 MPa Flow rate 420 NL/min | ||
| Standard accessories | Ceramic stylus, standard diamond stylus, AFP-H (2 pcs), standard ball for calibration, printer | |||
| 大型機 | Twin probe (top-surface and side-surface profilometer) |
High-accuracy equipment | ||
| Model name | UA3P-400T | UA3P-3000 | ||
| Appearance |  |
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| Outer dimensions (W x D x H) mm |
1100 x 1230 x 1540 | 1260 x 840 x 1510 | ||
| Mass of main body | 750 kg | 950 kg | ||
| Measuring range (X, Y, Z axes) mm |
100 x 100 x 35 | 100 x 100 x 110 | ||
| Measured object placement area (X, Y, Z axes) mm |
200 x 200 x 110 | 30 x 30 x 20 | ||
| Measuring probe | AFP/S-AFP | AFP*3 | ||
| Resolution | 0.3nm | |||
| Maximum inclination angle for top-surface measurement | 75° | 75° | ||
| Angle for side-surface measurement | Horizontal: 45-90° Vertical; 80-90° |
- | ||
| Measurement accuracy with top-surface probe * When using the standard ruby stylus or ceramic stylus |
30° max.: ±0.05 μm (round trip) 45° max.: ±0.08 μm (round trip) 60° max.: ±0.15 μm (round trip) 70° max.: ±0.15 μm (back) |
30° max.: ±0.05 μm (round trip) 45° max.: ±0.06 µm (round trip) 60° max.: ±0.07 µm (round trip) 70° max.: ±0.10 μm (round trip) |
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| Measurement accuracy by coordinate axis (XY axis measurement accuracy) |
100 mm max.: 0.05 μm (Repeatability 0.05 μm max.) | |||
| Measurement speed | 0.01-10 mm/sec | 0.005-5 mm/sec | ||
| Operating environment | Temperature | 20-23°C (Variation ±1°C max.) | ||
| Humidity | 20-60% (Wind from air conditioners should not directly blow onto the equipment) | |||
| Vibration |
Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2 |
Allowance 1.0 cm/s2 ( = 1.0 gal) Recommended 0.5 cm/s2 |
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| Required power source Power supply unit |
AC100V ±5%/15A | |||
| Air pressure source | 0.5 MPa - 1.0 MPa Flow rate100 NL/min | |||
| Standard accessories | Standard ruby stylus, standard diamond stylus, ø2-mm ruby stylus AFP, side-surface probe (1 each) Standard ball for calibration, printer |
Ceramic stylus, standard diamond stylus AFP-3000 (1) Standard ball for calibration, printer |
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Description on top-surface profilometer |  |
Description on side-surface profilometer |
| *2 | UA3P high-accuracy profilometer probe |
| *3 | Dedicated probe for UA3P-3000 |
| *4 | ·This product is categorized as a product (or technology) that qualifies as a regulated cargo as specified by the Foreign Exchange and Foreign Trade Act. ·To export or transfer abroad applicable products (or technology), you must gain permission for export in advance from the Japanese government. |