UA3P for Optical Devices : Ultrahigh Accurate 3-D Profilometer

 
Specifications
Standard equipment
Model name UA3P-300 UA3P-4 UA3P-5
Appearance
Outer dimensions
(W x D x H) mm
700 x 780 x 1500 1000 x 1100 x 1400 1200 x 1350 x 1550
Mass of main body 700 kg (Others: 150 kg) 1200 kg (Others: 150 kg) 1500 kg (Others: 150 kg)
Measuring range
(X, Y, Z axes) mm
30x30x20 100 x 100 x 35 200 x 200 x 45
Measured object placement area
(X, Y, Z axes) mm
100x100x100 220 x 220 x 115 330 x 330 x 230
Measuring probe AFP AFP AFP
Resolution 0.3nm
Maximum inclination angle for top-surface measurement 75º 60º 60º
Angle for side-surface measurement - - -
Measurement accuracy with top-surface probe
* When using the standard ruby stylus or ceramic stylus
30° max.: ±0.05 µm (round trip)
45° max.: ±0.08 µm (round trip)
60° max.: ±0.15 µm (round trip)
70° max.: ±0.15 µm (back)
30° max.: ±0.05 μm (round trip)
45° max.: ±0.10 µm (round trip)
60° max.: ±0.30 µm (round trip)
Measurement accuracy by coordinate axis
(XY axis measurement accuracy)
100 mm max.: 0.05 µm (Repeatability 0.05 µm max. )
200 mm max.: 0.1 µm (Repeatability 0.05 µm max.)
Measurement speed 0.005-5 mm/sec 0.01-10 mm/sec
Operating environment Temperature 20-23°C (Variation ±1°C max.)
Humidity 20-60% (Wind from air conditioners should not directly blow onto the equipment)
Vibration Allowance 2.0 cm/s2 ( = 2.0 gal) Recommended 0.5 cm/s2
Required power source
Power supply unit
AC100V ±5%/15A
Air pressure source 0.5 MPa - 1.0 MPa Flow rate 150 NL/min
Standard accessories Standard ruby stylus, standard diamond stylus, AFP (Model 300: 1 pc., Models 4 and 5: 2 pcs. each), standard ball for calibration, printer
 
Large-scale equipment
Model name UA3P-500H / 550H UA3P-650H UA3P-700H
Appearance
Outer dimensions
(W x D x H) mm
1200 x 1350 x 1550 2100 x 1820 x 2110 2100 x 1820 x 2110
Mass of main body 2300 kg (Others: 300 kg) 8500 kg (Others: 300 kg) 9000 kg (Others: 300 kg)
Measuring range
(X, Y, Z axes) mm
200 x 200 x 45(500H) /
200 x 200 x 45, 260 x 90 x 45(550H)
ø500 x 120 / 400 x 400 x 120 500 x 500 x 120
Measured object placement area
(X, Y, Z axes) mm
330 x 330 x 230 600 x 600 x 330
Measuring probe AFP*2 AFP*2 AFP*2
Resolution 0.3nm
Maximum inclination angle for top-surface measurement 75° 75° 75°
Angle for side-surface measurement - - -
Measurement accuracy with top-surface probe
* When using the standard ruby stylus or ceramic stylus
30° max.: ±0.05 μm (round trip)
45° max.: ±0.08 μm (round trip)
60° max.: ±0.1 µm (round trip)
70° max.: ±0.15 μm (back)
Measurement accuracy by coordinate axis
(XY axis measurement accuracy)
100 mm max.: 0.05 µm (Repeatability 0.05 µm max.) /200 mm max.: 0.1 µm (Repeatability 0.05 µm max. )
400 mm max.: 0.2 µm (Repeatability 0.05 µm max.) /500 mm max.: 0.3 µm (Repeatability 0.05 µm max.)
Measurement speed 0.01-20 mm/sec 0.01-30 mm/sec
Operating environment Temperature 20-23°C (Variation ±1°C max.)
Humidity 20-60% (Wind from air conditioners should not directly blow onto the equipment)
Vibration Allowance 2.0 cm/s2  ( = 2.0 gal)  Recommended 0.5 cm/s2
Required power source
Power supply unit
AC100V ±5%/15A
Air pressure source 0.5 MPa - 1.0 MPa Flow rate 250 NL/min 0.5 MPa - 1.0 MPa Flow rate 420 NL/min
Standard accessories Ceramic stylus, standard diamond stylus, AFP-H (2 pcs), standard ball for calibration, printer
         
大型機 Twin probe
(top-surface and side-surface profilometer)
High-accuracy equipment  
Model name UA3P-400T UA3P-3000  
Appearance  
Outer dimensions
(W x D x H) mm
1100 x 1230 x 1540 1260 x 840 x 1510  
Mass of main body 750 kg 950 kg  
Measuring range
(X, Y, Z axes) mm
100 x 100 x 35 100 x 100 x 110  
Measured object placement area
(X, Y, Z axes) mm
200 x 200 x 110 30 x 30 x 20  
Measuring probe AFP/S-AFP AFP*3  
Resolution 0.3nm  
Maximum inclination angle for top-surface measurement 75° 75°  
Angle for side-surface measurement Horizontal: 45-90°
Vertical; 80-90°
-  
Measurement accuracy with top-surface probe
* When using the standard ruby stylus or ceramic stylus
30° max.: ±0.05 μm (round trip)
45° max.: ±0.08 μm (round trip)
60° max.: ±0.15 μm (round trip)
70° max.: ±0.15 μm (back)
30° max.: ±0.05 μm (round trip)
45° max.: ±0.06 µm (round trip)
60° max.: ±0.07 µm (round trip)
70° max.: ±0.10 μm (round trip)
 
Measurement accuracy by coordinate axis
(XY axis measurement accuracy)
100 mm max.: 0.05 μm (Repeatability 0.05 μm max.)  
Measurement speed 0.01-10 mm/sec 0.005-5 mm/sec  
Operating environment Temperature 20-23°C (Variation ±1°C max.)  
Humidity 20-60% (Wind from air conditioners should not directly blow onto the equipment)  
Vibration

Allowance 2.0 cm/s2 ( = 2.0 gal)

Recommended 0.5 cm/s2 

Allowance 1.0 cm/s2 ( = 1.0 gal)

Recommended 0.5 cm/s2 

 
Required power source
Power supply unit
AC100V ±5%/15A  
Air pressure source 0.5 MPa - 1.0 MPa Flow rate100 NL/min  
Standard accessories Standard ruby stylus, standard diamond stylus,
ø2-mm ruby stylus
AFP, side-surface probe (1 each)
Standard ball for calibration, printer
Ceramic stylus, standard diamond stylus
AFP-3000 (1)
Standard ball for calibration, printer
 
TOP Description on top-surface profilometer SIDE Description on side-surface profilometer
*2 UA3P high-accuracy profilometer probe
*3 Dedicated probe for UA3P-3000
*4 ·This product is categorized as a product (or technology) that qualifies as a regulated cargo as specified by the Foreign Exchange and Foreign Trade Act.
·To export or transfer abroad applicable products (or technology), you must gain permission for export in advance from the Japanese government.