- UA3P
- Outline
- Feature
- Specifications
- Examples
- Options
Microscopic diameter of stylus tip
Applicable to micro-shapes by microscopic stylus
ø30μm Stylus (SEM enlargement)
Kinds of stylus
| Diameter of stylus tip | Length of stylus | Material of tip sphere |
|---|---|---|
| ø2.0mm (standard) | 11mm | Ruby |
| ø1.0mm | ||
| ø300μm | 2mm | |
| ø200μm | ||
| ø80μm | 500μm | Super-steel |
| ø30μm | 300μm |
*Stylus can be customized.
Optional functions
Supporting complicated measurement by variable options
Horizontal plane measurement
Measuring horizontal plane (points) by the exclusive stylus
Observation camera unit
High accuracy positioning by the observation camera unit
Microscope unit
Supporting checking with eyes by the microscope unit
Main Options
- Surface touch measurement function: by top area touch measurement, define a horizontal standard surface
- Variety of shape evaluation software: perpendicularity, concentricity, parallelism, thickness
- 3D path software: from the measurement object 3D-CAD model, auto-generate measurement path
- Camera viewing function: easy to approach micro-parts
- Variety of stylus: tip dimensions of ø30μm, ø80μm, ø120μm, ø300μm, ø1mm, ø2mm