6DoF Inertial Sensor for Automotive (6in1 Sensor)

6DoF Inertial Sensor for Automotive (6in1 Sensor)

Photo:6DoF Inertial Sensor for Automotive (6in1 Sensor)
  • Function Safety compliance (ISO26262) for automotive safety system
  • 6DoF sensors on one single MEMS structure with high accurate and for more system design
  • Contribute for compact and simple ECU system design

Topics

  • 2019-12-24 6DoF Inertial Sensor for Automotive (6in1 Sensor) has been commercialized.

Features

This sensor contributes for advanced system such as ADAS (Advanced Driver Assistance Systems), autonomous driving and so on, to detect 6DoF data which are composed by 3 axis (Forward and Backward, Left and Right, Upper and Lower) of Acceleration(Acc) and Gyro data.
3軸の加速度, 同3軸の角速度, 計6軸の慣性力の図

Feature #1  Function Safety compliance (ISO26262) for automotive safety system

  • Compatible with ASIL-D functional safety development

This sensor complies with ISO26262 according to the user system safety level (ASIL: Automotive Safety Integrity Level) , supports the construction of argument by providing necessary documents, and guarantees the quality for automotive applications.

Functional safety development img 機能安全開発全体像の図

Feature #2  6DoF sensors on one single MEMS structure with high accurate and for more system design flexibility

  • Orthogonality : ≦0.5° between Gyro and Acc axis

The misalignment between Acc and Gyro axis deteriorates data accuracy because Acc and Gyro sensors are comprised of the multiple chips in the conventional inertial sensor. 6in1 inertial sensor adapts one single chip solution in which all 6 axis of Acc and Gyro sit together. And all 6 axis are orthogonal and enables high accuracy data in spite of the installation posture.

Conventional sensor chip configuration
Gyro sensor
角速度センサ Gyro sensor
Orthogonality
≦1.5°
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Acceleration sensor
加速度センサ Acceleration sensor

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6in1 sensor chip configuration
角速度センサ Gyro sensor

Orthogonality
≦0.5°
 
 

Feature #3  Contribute for compact and simple ECU system design

  • 6DoF one package :4.5 x 4.5 x 1.1 mm

This sensor adapts electrostatic MEMS and encapsulates MEMS and ASIC by wafer level packaging to realize the world compact and low profile 6DoF inertial sensor. This enable automotive ECU system simple and smaller.

(A cross-sectional view)
Plastic package(Mold)
樹脂パッケージ(Mold) Plastic package(Mold)
Au Wire
Leadframe

Feature #4  Dimple processing contributes to improved mounting quality

Dimple processing enables soldering fillet visible at the side of lead terminals. This can confirm each terminal soldering correctly to the substrate land by the fillet visible inspection.

Dimple processing

ディンプル加工イメージ Dimple processing
ディンプル加工イメージ 拡大 Dimple processing Expansion
Dimple

Fillet visual image

General QFN package
一般的なQFNパッケージ General QFN package
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Dimple QFN package
ディンブルQFNパッケージ-->Dimple QFN package
*Photo seen from aboves
上から見た写真 *Photo seen from aboves

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6in1 sensor applications

6DoF one platform detects the movement of automotive body and contributes for automobile system applications.

LiDAR / RADAR
 LiDAR / RADAR
Inclination / Direction and Roll
Active Suspension
ESC(横滑り防止装置)/ロールエアバックシステム Electronic Stability Control/Roll over airbag system
Vibration/ Posture
Agricultural / Construction / Bike
ESC(横滑り防止装置)/ロールエアバックシステム Electronic Stability Control/Roll over airbag system
Posture / Roll
Electronic Stability Control/Roll over airbag system
ESC(横滑り防止装置)/ロールエアバックシステム Electronic Stability Control/Roll over airbag system
Posture / Roll and Slide
ARーHUD
 LiDAR / RADAR
Inclination / Vibration
Front camera
ESC(横滑り防止装置)/ロールエアバックシステム Electronic Stability Control/Roll over airbag system
Inclination / Vibration and Impact

*Other applications: Navigation, Head light control

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Rating

●Characteristics
Item Specification
Size(mm) 4.5x4.5x1.1
Operation temperature -40 ℃ ~ +105 ℃
Storage temperature -40 ℃ ~ +105 ℃
Operation voltage 3.3 ± 0.3 V
Current consumption ≦ 10 mA
Data interface SPI
Gyro Axis X, Y, Z
Zero point error ≦ ± 2.0 dps
Scale factor error ≦ ± 3.0 %
Full scale range ±300, ±150, ± 120, ±60,
±30 dps(Selectable)
Frequency response
(-3dB)
10, 12.5, 27, 30, 46, 60 Hz
±30 dps(Selectable)
Cross axis sensitivity ≦ ± 2.0 %
Output noise ≦ 0.1 dps rms
( 60 Hz )
Orthogonality ≦ 0.5°
Acc Axis X, Y, Z
Zero point error ≦ ± 50 mG (X, Y)
≦ ± 84 mG (Z)
Scale factor error ≦ ± 3.0 %
Full scale range ±16, ±8, ±2, ±1 G (Selectable)
Frequency response
(-3dB)
10, 46, 60, 250, 300, 400 Hz
(Selectable)
Cross axis sensitivity ≦ ± 2.0 %
Output noise "≦ 4 mG rms
(LPF : 60 Hz )
Orthogonality ≦ 0.5°
* 125℃ ver. is under development
125°C ver.
Specifications (planned)
-40 ℃ ~ +125 ℃
-40 ℃ ~ +125 ℃
●Reliability test condition (AEC-Q100 compliance)
Item Specification
Temperature humidity bias (THB) 85 ℃ / 85 %RH / 3.6 V / 1000 h
High temperature storage life (HTSL) 125 ℃ / 1000 h
High temperature operating life (HTOL) 105 ℃ / 3.6 V / 1000 h
Temp cycling(TC) -55 ℃ ~ 125 ℃ /
1000 cycles
Mechanical shock(MS) 1500 G / 0.5 ms / 5 times for each axis
Variable frequency vibration(VFV) 50 G / 20 Hz ~ 2 kHz / 4 times for each axis
 
125°C ver.
Specifications (planned)
150 ℃ / 1000 h
125 ℃ / 3.6 V / 1000 h
-55 ℃ ~ 150 ℃ /
1000 cycles

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