Ultrahigh Accurate 3-D Profilometer

Outline

It is impossible to manufacture parts without making measurements - the UA3P series supports nanometer-accuracy manufacturing by making precise measurements of fine shapes.

The UA3P series can measure aspherical lenses and free-form mirrors and their molds, which are essential for digital consumer electronics such as mobile phones, DSCs, DVDs, and Blu-ray recorders, as well as in home security, optical communications, and vehicle HUDs, to an accuracy of up to 0.01 µm.
Easy operation supports rapid feedback to machining.

Measurement accuracy and applicable field of each profilometer

Valid area of UA3P

Full lineup from ultrahigh accuracy measurement of ±0.10 µm at an inclination angle of 70° to measurement of large components of 500 mm

UA3P-3000UA3P-700H

Measurement area/accuracy by model

3D form measurements of perform a variety of lens measurement such as a aspheric lens measurement

Measured object

Mobile lens
Mobile lens
Lens barrel
Lens barrel
DSLR lens
DSLR lens
fθ lens
fθ lens
X-ray telescopic mirror
X-ray telescopic mirror
Lens mold
Lens mold
Camera lens
Camera lens
Toric lens mold
Toric lens mold
Stepper lens
Stepper lens
 

Feature

Technology for realizing ultrahigh accurate measurement

Coordinate measurement technology

The profilometer’s coordinate system is configured with three reference flat surfaces (mirrors) independent of the stages. The length of each X, Y, and Z axis is measured to a resolving power of 0.3 nm with the laser interference method using a He-Ne frequency-stabilized laser as a light source. This suppresses the influence of squareness and straightness of the stages to achieve high-precision measurement

Measurement error due to coordinate axis :

0.05 µm max. (up to 100 mm)

0.3 µm max. (up to 500 mm)

Coordinate measurement technology
 

Top-surface measuring probe/AFP (atomic force probe)

Top AF Probe

High-precision scanning and measurement of a measured object is feasible due to the use of ultra-low measuring forces.
The stylus is held by the micro-air slider, and the focus laser detects the movement of the stylus. The position of the AFP is tracked in line with the shape of the measured object to keep the measuring force constant.

Measuring force:0.15-0.30 mN (15-30 mgf)
* US3P-3000 requires 0.10-0.20 mN.

Stylus:

A diamond stylus with a tip angle of 30º and a radius of 2 µm can be used.

Top-surface measuring probe/AFP (atomic force probe)
 

Side-surface measuring probe/S-AFP

Side Side-AF Probe

The inclination of a probe mirror detected at high precision is fed back to the XY stages to enable scanning measurement with low-contact force (0.3 mN).
This enables measurement without deforming resin products, such as a lens barrel.

Measuring force: 0.3 mN (30 mgf)

Measurement accuracy:

±0.15 µm (when measuring 90º inclination)

Maximum measuring angle:

Horizontal measurement: 45º - 90º
(angle relative to horizontal surface)
Vertical measurement: 80º - 90º
(angle relative to horizontal surface)

Side-surface measuring probe/S-AFP
 

Software

Achieving high-speed and high-precision measurement with easy operation
Supporting any design information. An installation error in the measured object is three-dimensionally corrected to enable accurate profile measurement.

3D form measurements of a aspheric lens
 

Top side surface evaluation technology

TopSide

By synthesizing the top-surface data and side-surface data of a measured object, decentering and inclination of the optical axis of a lens or a mold can be evaluated with reference to the side surface.

3D form measurements of a aspheric lens