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    Ultrahigh Accurate 3-D Profilometer

    UA3P : Features
    UA3P Features Specifications Measurement (movie) Applications
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    Features
    It is possible to measure the object not to be able to measure by other machine.
    Everyone can operate easily without calibration.
    UA3P plays more than 4 roles.
    Measurement with extremely high level of 0.01μm precision
    Measurable up to high slope of 75 degrees*1
    2µm to 200mm operating range with nano precision
    An atomic force probe scans and measures the curved surface
    Measurement using lasers and atomic forces
    UA3P measurement field
    Correcting setup errors of the measured object
    Finding the center of aspherical parts
    Eliminating dust data automatically
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    Ultrahigh accurate measurement only in 3 minutes
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    Adopting graphical user interface
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    NC program automatic generation by only inputting measurement area
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    Extensive library of optional software