The development of the measurement technology is important to establish the production technology of the precise part.The form precision of 0.1µm and under is required with the aspherical lens used for the optical disk such as a CD and a DVD, the video camera, and so on. And, for the lenses used for the X-rays mirror, semiconductor exposure device and laser printer, there are more than 200mm diameter lenses which are required with ±10nm accuracy. It grappled with the development of the ultrahigh accurate three-dimensional profilometer by optical probe from before, and it was put to practical use in our company. We can measure aspherical lens to 30^o at non- contact with optical probe by focusing laser beam on measurement surface vertically. But, recently the measurement of the high slope angle aspherical lens of about 60^o, of the lens which gave a surface a reflection-less coat, was required.

Ultrahigh accurate three-dimensional profilometer (From now on, it is called UA3P.) was developed to meet the needs which it had like this. This profilometer can be applied to the form measurement of the various aspherical surfaces (in such cases as the rotation symmetrical surface, toric surface and sylindrical surface) and the plane and the step as well.

This profilometer is used for form inspection such as an optical disk, aspherical lens such as a video camera, a large diameter lens for the semiconductor exposure device, a long lens for the laser printer, a semiconductor and a hard disk. It is expected an application range spread out in all the more form now on.

UA3P uses atomic force probe (Atomic Force Probe : From now on, it is called AFP.) as a measurement probe. UA3P makes AFP approach to the territory where atomic force (repulsion) generates against the measurement surface and always keeps the atomic force constant and can measure the slope up to maximum 60^o . UA3P can measure the object without concerning the reflectance of the measurement surface. On the other hand, about the position detection (X,Y and Z axis), UA3P adopts laser interferometer method and uses ultra high precision mirror as reference plane. Moreover, UA3P measure so that the influence of straight is canceled. Therefore, UA3P can realize the most measurement accuracy in the world as a super-high accurate three-dimensional measurement machine by the above method.

*	When this measurement accuracy is compared to Mt Fuji, it is the same as measurement up to the sand grain size in order to measure the form of Mt Fuji.

Performance doesn't go for the aspherical lens if it isn't made with high accuracy of 1/10000mm. This accuracy can't be realized only with a processing machine. But, if it can be measured, it is possible to realize the needed accuracy by feedbacking the measurement result to processing machine. In case of aspherical lenses made by mass production such as lens for CD and video camera, mold is made and, glass and a plastic are molded and a lens is taken. But, in this case, as lenses shrink, a form as the mold isn't transcribed completely. But, if a mold and a molded lens can be measured, mass production of lens as design can be achieved by making the mold whose amount of contraction was foreseen.