Main body outer dimensions [mm]^*1
(W x D x H)

700 x 780 x 1500

1000 x 1100 x 1400

1200 x 1345 x 1550

Mass

Main body: 700kg (others: 150kg)

Main body: 1200kg (others: 150kg)

Main body: 1500kg (others: 150kg)

Measurement range
[X, Y, Z-axis]

30 x 30 x 20 mm

100 x 100 x 35 mm

200 x 200 x 45 mm

Maximum sample size
[X, Y, Z-axis]

100 x 100 x 110 mm

220 x 220 x 115 mm

330 x 330 x 230 mm

Probe

Atomic force probe
•Ruby: Tip curvature radius 0.5mm
•Diamond: Tip curvature radius 2µm
Measurement force : 0.15 to 0.3mN (15 to 30mgf)

Maximum measurement angle

75°

60°

Probe Measurement accuracy

Ruby stylus:
Measurement surface inclination angle
•Up to 30° 0.01 to 0.05μm
•Up to 45° up to 0.08μm
•Up to 60° up to 0.15μm
•Up to 70° up to 0.15μm (downward)
Standard diamond stylus:
Measurement surface inclination angle
Up to 30° up to 0.1μm^*2

Ruby stylus:
Measurement surface inclination angle
•Up to 30° 0.01 to 0.05μm
•Up to 45° up to 0.1μm
•Up to 60° up to 0.3μm
Standard diamond stylus:
Measurement surface inclination angle
Up to 30° up to 0.1μm^*2

Measurement error of coordinates
(Measurement range of XY coordinate axes)

Up to 100mm within 0.05μm (repeatability within 0.05μm)
Up to 200mm within 0.1μm (repeatability within 0.05μm)

Measuring speed

0.005 to 5mm/sec
variable in multiple steps

0.01 to 10mm/s
variable in multiple steps

Basic software

Automatic NC creation, Auto alignment (including correction probe radius), Data edit, Auto centering, Realtime monitoring in measurement, 3-D color graph, Risarju shape of waves display function

Operating
environment

Thermostatic chamber

20 to 23°C (allowable variation ±1°C)

Relative humidity

20 to 60% in a room with a little dust. Never blow air to the profilometer directly (e.g. from an air conditioner)

Vibration acceleration

Recommended: 0.5cm/s², Allowable: 2.0cm/s² (=2.0gal)

Cleanness

Class about 15,000 or below (particle size 0.5μm)

Equipment required
(prepared by the user)

Power supply

AC100V ±5%, 15A and a 3P×1 piece table tap is needed.
It must be the electricity circuit of the independent exclusive use.
If a power supply of user’s factory is except 100V, user must prepare a transformer.

Air supply

A single dry-air system (with manual valve) with pneumatic pressure: between 0.5MPa (=5kgf/cm2)
and 1.5MPa (=15kgf/cm2) and flow rate: 150NL/minute*3 (under normal condition)
A ø8 tube (outside diameter) must be accepted.

Computer desk

For the personal computer, keyboard, printer etc. (over 50Kg)

UPS

Output voltage AC100V ±5%, Output Capacity 1400VA/940W, Plug receptance NEMA5-15R

Stage

Decline stage, Rotation stage, Z-axis stage^*4

Accessories

Standard ruby stylus, Standard diamond stylus,
Atomic force probe (each 1 piece in the case of UA3P-300 type, each 2 pieces in the case of UA3P-4 and 5 type),
Stylus replacement, Standard sphere, Printer

Consumption parts

Stabilized He-Ne laser, Semiconductor laser, AFP, Standard ruby stylus, Standard diamond stylus, Z-axis spring, Printer ink

Remarks

Main body: Class 1 laser product, Built-in laser: Class 3R (2.5mW)